Welcome to the Modu-Lab users group. Here is where you will find the most efficient methods for fundamental microfabrication education. --      Modu-Lab - Low Cost Tools for High Tech Learning!!!
Modu-Lab
 

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Va. Tech Students JAZZED with Modu-Lab!

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EMS

 

right click here to save the Plasmatronics Video.    

This site is dedicated to the memory of JEAN HOERNI, 1924-1997 - The inventor of planar process and the godfather of the integrated circuit. In the spirit of fundamental principles as the basis of knowledge, Modu-Lab offers to complete the circuit of concept and concrete in regard to microfabrication techniques. The individual process steps can inspire whole volumes of insight and expertise; but, the overall procedure remains pretty much the same -- Deposit, Pattern, Etch, Repeat. Please bear in mind that the permutations of this simplified outlook are virtually endless given the selection of materials and, most importantly, the patterns utilized. This site is intended to be a clearinghouse  that will enable the rapid dissemination of ideas and techniques that have value to educators and  students as well professionals in the fields of  microfabrication. From here, Modu-Lab users are able to download experiments and exercises developed by other users, post comments, and exchange ideas.  There are also links with other companies and institutions that have or are developing microfabrication materials. Also available: A slide show of the Modu-Lab modules, and on-line operation and maintenance manuals. As we must fund development of Modu-Lab and its peripherals from within, It may take a while to get all the materials posted. Please bear with us while we work out the bugs and endeavor to improve. If any individuals, organizations, or institutions would care to co-sponsor this site or assist in any way, please contact EMS at the addresses listed at the bottom of this page.

"Great spirits have always found violent opposition from mediocre minds..." ----- A. Einstein

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Improved!       Module Slide Show

(Be sure to look at the text versions!)
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Modu-Lab User Group Site Launched

The first draft of the site is up and running.  We are adding material as it becomes available.  We welcome any suggestions that will improve the appearance or use of the site.  We especially welcome suggestions about what you as a user would like to have in the way of additional equipment and experiment. 
User Resources:
MASK LIBRARY: 
Mask Templates 
.PPT .DXF .DWG ? ?

MANUAL LIBRARY:

Equipment Operation, Maintenance and Repair
EXPERIMENT LIBRARY:

Photolithography:

Resist Deposit

Resist Bake

Align & Expose

Develop

Image Reversal

Minimum Dimension

 

Etch:

Etch Rate

Etch Stop

Undercut

Lift-Off

 

Metalization:

Evaporation

Vacuum

Mean Free Path

Pumping Speed

Pressure Measurement

 

Oxidation:

Dry Ox

Wet Ox

Ox Rate

Oxide Integrity

 

Diffusion:

P Dope

N Dope

Diffusion Mask

Junction Depth

 

 

Process:

Resistors

Diodes

BJT

MOS

 

EXERCISE  LIBRARY:

Data Collection Data Analysis Mathematical Decision Making SPC Yield Improvement

Graphics (coming soon) -  Example pictures of common wafer fab components 

 

Modu-Lab  Process Tidbits (coming soon) Hints, Tweeks, Shortcuts 

Coming Later: Modu-DoG Sez:  Interactive Lab Protocol Primer 

Click here to send questions, request information, or submit additions

The webmaster will act as the intermediate for posting your material.

Links:

Colleges, Universities, and Associations
Virginia Tech -- Material Science and Engineering
University of San Francisco -- Physics Dept.
University of Virginia -- School of Engineering and Applied Science
Northern Virginia Community College -- See the Beta Demonstration Slide Show
S.U.N.Y. Buffalo -- Great Site! Check out these applets!
Colorado School of Mines -- A straight forward approach to laboratory silicon processing
Maracopa Advanced Tech Education Center -- Resources and Links for SMT Programs
George Mason University -- Electrical Engineering
U Cal - San Diego -- Integrated Technologies Lab
M.I.T. Semiconductor Subway -- An Excellent Resource - Links to just about everything concerning semiconductors

Process, Procedure and Safety Info
Process Techniques -- UCLA Resource Site
Oxide Thickness Calculator -- Stanford Nano Fab
Semiconductor Process -- Cool Graphics and linked dictionary
Microfabrication Lab Safety -- An Excellent Page for Lab Procedures
Mcgraw-Hill EE & CS Site -- No planar process; but, a cool electronics tutorial

Chemicals and Supplies
Spin-On Dopant Resource -- Complete Spin-On Film resource Site
Photoresist and Develop Resource -- Resist, Develop and Process Parameters
Photoresist and Develop Resource -- Resist, Develop and Process Parameters
Virginia Semiconductor -- Wafers, Wafers, and -------- More Wafers!
Wafer Tweezers -- Wide Variety of Tweezers

Committed to Excellence!

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Contact Information

Telephone
505 404 1087
FAX
505 404 0281
Postal address
109 Hermosa Dr. SE -- Albuquerque, NM 87108
 
Electronic mail
General Information: electro@emsi-usa.com
Sales: electro@emsi-usa.com
Customer Support: electro@emsi-usa.com
Webmaster: rwinder@emsi-usa.com
Page Hits: Since 2/2/00
Last modified: Feb 22, 2008